US12481201 - Flexible infrared selective emitter and manufacturing method thereof
The invention describes a flexible infrared selective emitter that can emit infrared energy at specific wavelengths, enabling effective camouflage by conforming to various object shapes. It consists of a substrate, a conductive thin film layer, and a meta-surface with structured insulating and metal layers, designed for flexibility and specific emissivity characteristics.
Claim 1
1 . A flexible infrared selective emitter, comprising: (a) a substrate; (b) a conductive thin film layer which is disposed on the substrate; and (c) a meta-surface portion in which a plurality of structures in which an insulating layer and a metal layer are laminated are arranged to form a predetermined pattern on the conductive thin film layer; wherein the insulating layer is any one selected from silicon nitride (Si 3 N 4 ) and silicon oxide (SiO 2 ); wherein the metal layer is formed of gold (Au); wherein, when the insulating layer is silicon nitride, the thickness of the insulating layer is 50 to 100 nm; wherein, when the insulating layer is silicon oxide, the thickness of the insulating layer is 100 to 200 nm; wherein the thickness of the metal layer is 100 to 300 nm; wherein the size of the structure is 1 to 3 μm; wherein the emissivity is 0.2 or less in infrared wavelength bands of 3 to 5 μm and 8 to 12 μm; and wherein the flexible infrared selective emitter has a radius of curvature of 250 μm or more. (a) a substrate; (b) a conductive thin film layer which is disposed on the substrate; and (c) a meta-surface portion in which a plurality of structures in which an insulating layer and a metal layer are laminated are arranged to form a predetermined pattern on the conductive thin film layer; wherein the insulating layer is any one selected from silicon nitride (Si 3 N 4 ) and silicon oxide (SiO 2 ); wherein the metal layer is formed of gold (Au); wherein, when the insulating layer is silicon nitride, the thickness of the insulating layer is 50 to 100 nm; wherein, when the insulating layer is silicon oxide, the thickness of the insulating layer is 100 to 200 nm; wherein the thickness of the metal layer is 100 to 300 nm; wherein the size of the structure is 1 to 3 μm; wherein the emissivity is 0.2 or less in infrared wavelength bands of 3 to 5 μm and 8 to 12 μm; and wherein the flexible infrared selective emitter has a radius of curvature of 250 μm or more.
Google Patents
https://patents.google.com/patent/US12481201
USPTO PDF
https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/12481201